Abstract. These lecture notes are intended to give an introductory course on plasma
spectroscopy. Focusing on emission spectroscopy, the underlying principles of atomic
and molecular spectroscopy in low temperature plasmas are explained. This includes
choice of the proper equipment and the calibration procedure. Based on population
models, the evaluation of spectra and their information content is described. Several
common diagnostic methods are presented, ready for direct application by the reader,
to obtain a multitude of plasma parameters by plasma spectroscopy.

2011/9/2
我们在此以万分悲恸的心情 感念
亿达科技股份有限公司 董事长
蔡福星先生的辞世
1954/10/15~2011/8/18
Your Loved One lives In Your Heart
Many tender memories soften your grief,
May fond recollection bring you relief,
And may you find comfort and peace in the thought
Of the joy that knowing your loved one brought...
For time and space can never divide
Or keep your loved one from your side
When memory paints in colors true
The happy hours that belonged to you.
~ Helen Steiner Rice
2011/9/9
Visit us at AEPSE 2011
At the AEPSE 2011 conference we will display our latest products for plasma
monitoring and process control:
- Spectroscopic plasma monitor systems
- Coating protection devices for KF/CF window flanges
- Latest in-vacuum optics with improved design
The AEPSE 2011 conference takes place in Dalian, China from September 19th until
22nd. We will be happy to see you at our exhibition booth.
2011/9/9
Visit us at TVS Annual Meeting 2011
At TVS Annual Meeting 2011 we will display our latest products for plasma monitoring
and process control:
- Spectroscopic plasma monitor systems
- Coating protection devices for KF/CF window flanges
- Latest in-vacuum optics with improved design
TVS Annual Meeting 2011 takes place at NTHU, Taiwan on October 28th. We will be
happy to see you at our exhibition booth.
2012/1/17
因应农历新年假期,1/21~1/29公司暂时停止营运,1/30恢复上班。
2012/7/16
2012第六届中国(上海)国际真空技术及设备展览会
展会时间: 2012年7月18日---20日
展会地点: 上海新国际博览中心(浦东新区龙阳路2345号)
摊位号码: 6313
欢迎莅临参观指导
2012/11/13
2012第九届中国(深圳)国际触摸屏展览会
展会时间: 2012年11月25日---27日
展会地点: 深圳会展中心
摊位号码: A336 (Hall 3)
欢迎莅临参观指导
2013/2/6
庆祝农历新年,公司于2月8日至2月17日不营业,2月18日恢复上班。
恭喜发财 新年快乐
2013/8/5
2013第三届广州国际真空工业展览会
展会时间: 2013年8月21日---23日
展会地点: 广州保利世贸博览馆
摊位号码: C25
欢迎莅临参观指导
2013/11/18
2013第十届中国(深圳)国际触摸屏展览会
展会时间: 2013年11月25日---27日
展会地点: 深圳会展中心
摊位号码: 9A957 (Hall 9)
欢迎莅临参观指导
2014/8/1
我们很荣幸正式邀请日本FOU Corporation成为日本区域的合法经销商,负责EMICON与
SpecLine产品的销售、训练与售后服务。
2015/4/25
新产品EMICON SA将于4月28日到29日在美国Santa Clara的SVC TechCon 2015展会中发表
欢迎莅临参观指教 摊位号码: 918
The new EMICON SA System
Stand-Alone Spectroscopic Plasma Monitor System for industrial production lines:
- Stand-Alone plasma monitor system with integrated processor unit
- Multi-channel data acquisition with up to eight spectrometer modules
- Analog inputs for connecting sensor signals
- World’s fastest data acquisition cycle down to 1 ms
- Easy integration to industrial application using common communication standards: LAN, Profibus, I/Os